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发明名称
摘要
申请公布号
JP2984778(B2)
申请公布日期
1999.11.29
申请号
JP19950064680
申请日期
1995.02.27
申请人
SUMITOMO SHICHITSUKUSU AMAGASAKI KK
发明人
OONISHI TAKASHI;YOSHIMURA YASUTOKU;OKAMOTO SETSUO
分类号
B21J1/04;B21J5/00;C22F1/00;C22F1/18;C23C14/34;H01L21/203;H01L21/28;H01L21/285;(IPC1-7):C23C14/34
主分类号
B21J1/04
代理机构
代理人
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