发明名称 Zinc-tin alloy sputtering target
摘要 The present invention provides a method of making a coated article, including the steps of: (A) providing a substrate; (B) depositing one or more dielectric layers over the substrate, the dielectric layers comprising: (i) a first dielectric film having at least one film of zinc oxide, silicon oxide, tin oxide, silicon nitride, silicon oxynitrate, or an oxide of an alloy of zinc and tin having zinc in a weight percent range of 10 to 90 and tin in a weight percent range of 90 to 10, and (ii) a second dielectric film deposited over the first dielectric film, the second dielectric film having at least: a zinc oxide, tin oxide film, wherein the zinc oxide, tin oxide film has tin in a weight percent range of greater than 0 to less than 10 and the majority of the balance being zinc; and (C) depositing one or more infrared reflective layers on at least one of the dielectric layers.
申请公布号 AU3972699(A) 申请公布日期 1999.11.29
申请号 AU19990039726 申请日期 1999.05.06
申请人 PPG INDUSTRIES OHIO, INC. 发明人 DENNIS J. O'SHAUGHNESSY;JAMES J. FINLEY;PAUL A. MEDWICK
分类号 C03C17/34;C03C17/245;C03C17/36;C23C14/08;C23C14/34 主分类号 C03C17/34
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