| 摘要 |
PURPOSE:To freely control the deflection angle of a flexible substrate, and to improve a productivity by positioning a parallel extended part on the bottom face of a packing material while folding an orthogonal part orthogonally to the array direction of a fine piezoelectric piece, and matching the width direction of the parallel extended part with the length direction of the fine piezoelectric piece. CONSTITUTION:The orthogonal part 22 of a flexible substrate 21 is extended orthogonally to the array direction of a fine piezoelectric piece 1. Then, in a parallel part 23, the orthogonal part 22 is perpendicularly folded to the bottom face of a packing material 2, the width direction of an extended part 23 is matched with the length direction of the piezoelectric piece 1, and each flexible substrate 21a, 21b, and 21c is bundled on one edge side. Thus, a probe main body can easily be folded to the array direction of the piezoelectric piece 1, and the probe with abundant versatility can be obtained with a satisfactory productivity. |
