CANTILEVER TYPE PROBE, MULTIPLE PROBE AND SCAN TYPE PROBE MICROSCOPE CONSTITUTED OF THE SAME

摘要

PROBLEM TO BE SOLVED: To measure with a high sensitivity by increasing aΔR/R0 (a resistance change of a piezoelectric resistor when a stress acts to a thin film cantilever to a total resistance of the piezoelectric resistor when the stress does not act). SOLUTION: This cantilever type probe has a thin film cantilever 101, a supporting member 102 for the thin film cantilever 101, a piezoelectric resistor 103 formed in the vicinity of a surface of the thin film cantilever from the thin film cantilever 101 to the supporting member 102, and an electrode 104 electrically connected to the piezoelectric resistor 103. A thickness of the piezoelectric resistor 103 at a part where a stress acts is made smaller than a thickness of the piezoelectric resistor 103 at a part where a stress does not act. The multiple probe and the scan type probe microscope are constituted of this cantilever type probe.