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发明名称
INSPECTION METHOD AND DEVICE
摘要
申请公布号
JPH11326224(A)
申请公布日期
1999.11.26
申请号
JP19980319331
申请日期
1998.11.10
申请人
OMRON CORP
发明人
SHIMIZU ATSUSHI;ITO YOSHINORI
分类号
G01M11/00;G01N21/88;G01N21/958;(IPC1-7):G01N21/88
主分类号
G01M11/00
代理机构
代理人
主权项
地址
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