| 摘要 |
PROBLEM TO BE SOLVED: To obtain a limiting current-type oxygen sensor by which the concentration of oxygen can be measured over a wide concentration range from a high concentration down to a low concentration and which is suitable for mass production. SOLUTION: In an oxygen sensor, a cathode film 12, a solid electrolyte film 13 and an anode film 14 are laminated sequentially on a substrate 11, and the solid electrolyte layer 13 is used as a diffusion controlled layer. The anode film 14 does not have any gas permeability, and a hole 15 is formed in at least a part. When oxygen gas is made to flow into the solid electrolyte film 13 through the hole 15, the amount of the gas flowing into the solid electrolyte film 13 is limited. |
