MASK DATA COMPARISON AND VERIFICATION EQUIPMENT, METHOD FOR COMPARING AND VERIFYING MASK DATA, AND MEDIA STORING MASK DATA COMPARISON AND VERIFICATION PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide a mask data comparison and verification equipment capable of comparing and verifying mask data among the mask data with improved processing efficiency. SOLUTION: Mask data comparison and verification equipment comprises: a mask data generating and processing part 23 for generating mask data A24 from design data A21 and processing parameters A24; a processing-parameter writing part 26 for mating the processing parameters A22 with mask data A24 generated by the mask data generating and processing part 23 and storing these; and a mask data comparison and verification part 31. Through these steps, mask data are compared and verified based on mask data A'27 and mask data B'28 which are mated to each other and stored by the processing- parameter writing part 26.