发明名称 PHOTOSENSITIVE RESIN COMPOSITION
摘要 PROBLEM TO BE SOLVED: To provide a photosensitive resin composition excellent in resist releasing ability, resolution, and fine line adhesion. SOLUTION: In a photosensitive resin composition which comprises a base polymer (A), an ethylenically unsaturated compound (B), a photopolymerization initiator (C), a plasticizer (D) (especially, p-toluenesulfonamide) and a dye (E), a copolymer (al) having a weight-average molecular weight of 50,000 to 70,000 and a copolymer (a2) having a weight-average molecular weight of more than 70,000 and not more than 100,000 are included as the base polymer (A), at least one of the copolymers (a1) and (a2) having an acid number of 130 mg KOH/g, and a lophin dimer (c1) is further included (preferably, an acridine derivative (c2) is further included) as the photopolymerization initiator (C).
申请公布号 JPH11327138(A) 申请公布日期 1999.11.26
申请号 JP19980142318 申请日期 1998.05.08
申请人 NIPPON SYNTHETIC CHEM IND CO LTD:THE 发明人 MURAKAMI SHIGERU;KOSAKA EIJI;FUJIMOTO NAOHIKO
分类号 G03F7/004;C09D4/06;C09D5/00;G03F7/027;G03F7/028;G03F7/031;G03F7/033;H01L21/027;(IPC1-7):G03F7/033 主分类号 G03F7/004
代理机构 代理人
主权项
地址