| 摘要 |
<p>PROBLEM TO BE SOLVED: To realize efficient machining by using a mirror whose angle of inclination of the reflection face at each position of the mirror is designed corresponding to the spot shape and intensity distribution of a laser beam and to those of a beam emitted to an irradiated face. SOLUTION: A rectangular coordinate system, where an optical axis is the origin and the direction of an uniform intensity distribution to be converted is taken as a (y)-axis and the direction orthogonal to it is taken as an (x)-axis, is defined on a plane which includes a point S and is orthogonal to the optical axis of incident light. Assuming that a reflected light 4 from an arbitrary point P of a mirror 1 arrives at an irradiation position 5 and arrives at a point Q on the plane orthogonal to the optical axis in the irradiation position 5, it is sufficient if the point Q is so determined that a desired beam profile 6 which has a uniform intensity distribution with respect to a uniaxial direction be obtained in this position. In order to make the reflected light 4 of the mirror 1 arrive at a position corresponding to the point Q, it is sufficient if the normal of the curved surface at the point P of the mirror 1 divides∠SPQ equally into two.</p> |
