POSITIONING DEVICE AND SEMICONDUCTOR MANUFACTURING DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To prevent the positioning error due to the disturbance of a coarse movement stage among positioning errors by performing correction driving of coarse movement and fine movement stages when an output of a fine movement stage drive quantity detecting means becomes a prescribed value when neither the coarse movement nor fine movement stage moves and is driven. SOLUTION: When neither coarse movement nor fine movement stage moves and is driven, a laser interference device 112 as a fine movement stage drive quantity detecting means detects the position of an object on a fine movement stage and inputs this detection output to an interference device controller 113. The controller 113 outputs range data S107 by the interference device to a servo controller 108 and the controller 108 outputs a drive pulse to a fine movement controller 109 so that the data S107 that is feedbacked can be a prescribed target value. When it becomes the prescribed target value with the drive pulse, the coarse movement and fine movement stages are subjected to correction driving.