| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an aligner, a method and an apparatus which makes it possible to take high-precision measurement of the position of an XY stage even take by a plane mirror having a length shorter than a moving stroke, and to realize cost reduction and a high control performance of the stage. SOLUTION: Since second light-wave interferometers (LY1 , LY2 ) for measuring the coordinate position Y of a stage relating to the second position (y-direction) are switched over, and a measuring position in the first direction is switched over, in accordance with the coordinate position X of the stage 8 relating to a first direction (x-direction) measured on the basis of the output of a first light wave interferometer LX, high-precision position measurement in the second direction becomes feasible, even if a reflecting surface RY shorter than the first-direction moving stroke of the stage is used. Furthermore, it is possible to reduce the cost of the apparatus and to make the performance of movement control of time stage higher, by shortening the reflecting surface.</p> |
