| 摘要 |
PROBLEM TO BE SOLVED: To miniaturize a surface inspection device for detecting the defect of the surface of a sample by a defect detection means and observing it by a defect observation means. SOLUTION: The sample 2 is supported freely movably in an X direction and supported freely rotatably in aθdirection, and the detection position of the defect detection means 23 and the observation spot of the defect observation means 24 are positioned on the straight line in the X direction of the rotation center. When the spots are positioned at both ends of the moving range of the rotation center, even when a moving distance in the X direction is turned to the half of the maximum length of the sample 2, the entire area of the surface of the sample 2 is inspected and this entire device is miniaturized.
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