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发明名称
ASPHERICAL SURFACE SHAPE MEASUREMENT DEVICE
摘要
申请公布号
JPH11325848(A)
申请公布日期
1999.11.26
申请号
JP19980153807
申请日期
1998.05.19
申请人
NIKON CORP
发明人
NAKAYAMA SHIGERU
分类号
G01B9/02;G01B11/24;(IPC1-7):G01B11/24
主分类号
G01B9/02
代理机构
代理人
主权项
地址
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