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发明名称
Method of manufacturing a semiconductor device
摘要
<p>소스/드레인으로 이루어지는 p형 영역상에는 실리사이드막이 형성되어 있다. 실리콘 산화막은 실리사이드막을 노출시키는 콘택트 홀을 갖는다. 콘택트 홀을 통하여, p형 영역에 B를 이온 주입한다. 실리사이드막상에 Ti막을 형성한다. Ti막 형성후, 주입된 이온을 780 내지 900℃에서 어닐하여 소스/드레인을 구성하는 다른 p형 영역을 형성한다.</p>
申请公布号
KR19990082992(A)
申请公布日期
1999.11.25
申请号
KR19990011971
申请日期
1999.04.07
申请人
null, null
发明人
가와하라게이
分类号
H01L21/28;H01L21/285;H01L21/336;H01L21/768;H01L23/485;H01L29/78
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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