SORBENT-BASED GAS STORAGE AND DELIVERY SYSTEM FOR DISPENSING HIGH-PURITY GAS

摘要

A sorbent-based gas storage and dispensing system includes a storage and dispensing vessel (10) containing a solid-phase physical sorbent medium (17) having a sorbate gas physically adsorbed thereon. A chemisorbent material (138) is provided in the vessel (10) to chemisorb impurities for gas phase removal thereof. Desorbed sorbate gas is discharged from the vessel (10) by a dispensing manifold (12) coupled thereto. The chemisorbent material (138) may be provided in a capsule including an impurity-permeable, but sorbate gas-impermeable membrane (136), and installed in the vessel (10) at the time of the loading of the sorbent medium (17). Semiconductor manufacturing processes and products manufactured by such processes are also described.