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发明名称
TURN TABLE FOR VACUUM DEPOSITION APPARATUS
摘要
申请公布号
JPH11323550(A)
申请公布日期
1999.11.26
申请号
JP19980125981
申请日期
1998.05.08
申请人
KOBE STEEL LTD
发明人
SUZUKI TAKESHI
分类号
C23C14/32;C23C14/50;H01L21/203;(IPC1-7):C23C14/50
主分类号
C23C14/32
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代理人
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