| 摘要 |
<p>An aligner (10) for aligning a wafer chuck (50), a wafer (W), and a contactor (60) with each other, integrating them together by means of air feeding/exhausting means to form a shell (S), and disassembling the shell (S) to them. An identification code (62) is given to the contactor (60). A reader (41) reads the identification code (62). The identification code (62) read by the reader (41) is correlated with the position of a main chuck (15) of when first and second valve mechanisms (51, 52) are connected, and then stored in a controller (40). When the shell (S) is disassembled, the position of the main chuck (15) is sought by the controller (40) in reference to the identification code (62). The main chuck (15) is moved according to the results of the search.</p> |
