MEMBRANE MASK FOR PROJECTION LITHOGRAPHIC,申请号KR19990011551-传众专利搜索

首页产品黄页商标征信

会员服务注册登录

法人/股东/高管

发明名称	MEMBRANE MASK FOR PROJECTION LITHOGRAPHIC
摘要	<p>본 발명에 따라 하전 입자 빔 리소그래피 공정에 사용되는 개선된 산란형 마스크가 제공되는데, 마스크는 멤브레인 부분 및 산란 부분을 포함하고, 멤브레인 부분은 도전성 재료로 제조되거나 또는 그 중 하나가 도전성을 지니는 다수의 재료로 제조된다. 멤브레인 부분의 도전성 속성은 마스크 내의 전하의 축적을 완화시켜 공정 중에 마스크로부터 웨이퍼로 전달된 하전 입자 패턴의 선명도를 강화하며 시스템에서 얻어진 왜곡을 감소시킨다.</p>
申请公布号	KR19990082868(A)	申请公布日期	1999.11.25
申请号	KR19990011551	申请日期	1999.04.02
申请人	루센트 테크놀러지스 인크	发明人	리들제임스알렉산더;노벰브르안소니에드워드;위버게리로버트
分类号	H01L21/027;G03F1/20	主分类号	H01L21/027
代理机构		代理人
主权项
地址

您可能感兴趣的专利

Breathable cable connector for mechanical and hydroscopically sealed bushing of shielded or unshielded electrical cable or wiring bundle, has ventilation channel arranged in hollow cylindrical lower part

Tool e.g. for needle for processing textile materials, can manually change and or process textile materials with elongated element is provided having luminous decorative end having sections with coating layer

Injector, in particular common rail injector for injecting fuel into combustion chamber of internal combustion engine, has valve element, which is adjustable between open position and closing position to enable flow of fuel

Device e.g. for redrawing picture template, has two even areas, square frames with intertwined arrangement and has orthogonal grid having grid lattice spacing being arranged for each frame size

Device for preparing a carbonated mixed drink comprises a mixing chamber with a pressure-tight lid arranged between a feed unit and a release unit

Optical system for forming an image of a subject has a source of light for illuminating a subject and optical elements/lenses or mirrors for forming an imaging beam path from illuminating light reflected/scattered by the subject

Cabriolet vehicle e.g. multi-seated vehicle, has cover part staying smaller in opened opening position during release of opening for roof, and larger in moved opening position during release of load opening in spite of similar movements

Module component for vehicle, has assembly support and multiple functional components of vehicle pre-assembled on assembly support, where a functional component is pre-assembled on assembly support in assembly position

Device for holding grooming apparatus, especially brushes

DEVICE FOR CUTTING LABELS IN A LABELLING MACHINE

SYSTEM FOR AUTOMATING THE DEFINITION OF APPLICATION OBJECTS SUPPORTING UNDOING, REDOING, COMPRESSING AND LOGGING OPERATIONS

Muffler for gas carrying systems, comprises muffler chamber, having gas outlet and carries gas over inlet pipe, which meets in funnel section, which forwards flowing gas

SINK DEVICE ADDRESSING MECHANISM

Drilling hole assistance e.g. for drilling holes into items by using hand drill, provided on drill or on drill neck showing vertical location of drill

AC INVERTER CAPABLE OF DRIVING MULTIPLE LAMPS FOR LCD PANEL BACKLIGHT

Electrohydraulic valve, particularly automotive high pressure-regulating valve, for regulating pressure in common-rail-diesel fuel injection system, has hydraulic part and electrical part, where valve is enclosed by cover

Device for treating water comprises parallel partial sections and units for concentrating the water flow onto the partial sections

User session managing method for use in e.g. picture archiving and communications system, involves automatically storing condition i.e. last condition of session, of user session based on user interaction during or after user session

Fuel injecting method for use in i.e. diesel engine, involves realizing injection of fuel in direction of tangent proximity to inner circular line of combustion chamber, where jet of fuel rotates from larger to smaller radius

Arrangement e.g. for recognizing double copies in mail sorting plants, has side and projector which has light source projected across potential overlap of objects