<p>A high vacuum valve which prevents heat from being conducted from a valve disc (18) of a valve (31) through a valve shaft (19) to a low temperature part, wherein, after the valve disc (18) is moved to a position opposite to a valve seat (24) by the linear motion of the valve shaft (19), the valve disc (18) is pressed against the valve seat (24) by the oscillating motion of the valve shaft (19) so as to close the valve (31).</p>