发明名称 HIGH VACUUM VALVE
摘要 <p>A high vacuum valve which prevents heat from being conducted from a valve disc (18) of a valve (31) through a valve shaft (19) to a low temperature part, wherein, after the valve disc (18) is moved to a position opposite to a valve seat (24) by the linear motion of the valve shaft (19), the valve disc (18) is pressed against the valve seat (24) by the oscillating motion of the valve shaft (19) so as to close the valve (31).</p>
申请公布号 WO9960294(A1) 申请公布日期 1999.11.25
申请号 WO1999JP02217 申请日期 1999.04.26
申请人 SMC KABUSHIKI KAISHA;ISHIGAKI, TSUNEO;SHIBUYA, KEIICHI;FUKUDA, MAMORU;WARAGAI, KENJI 发明人 ISHIGAKI, TSUNEO;SHIBUYA, KEIICHI;FUKUDA, MAMORU;WARAGAI, KENJI
分类号 F16K49/00;F16K51/02;(IPC1-7):F16K51/02 主分类号 F16K49/00
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