Verfahren zur Erzeugung eines Musters,申请号DE19916031732-传众专利搜索

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发明名称	Verfahren zur Erzeugung eines Musters
摘要
申请公布号	DE69131732(D1)	申请公布日期	1999.11.25
申请号	DE19916031732	申请日期	1991.03.27
申请人	MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.	发明人	KOIZUMI, TAICHI;TANI, YOSHIYUKI;SASAGO, MASARU
分类号	G03F7/004;G03F7/022;G03F7/039;G03F7/09;G03F7/105;G03F7/20;G03F7/26;G03F7/38;H01L21/027;H01L21/30;(IPC1-7):G03F7/039	主分类号	G03F7/004
代理机构		代理人
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