发明名称 LASER CUTTING METHOD AND DEVICE THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a laser cutting method and a device thereof which enables to restrain a thermal effect to be generated at a cutting portion and to obtain a minimum required energy density sufficiently while restraining the device from getting into enlarged size. SOLUTION: This is referred to a laser cutting method for cutting a tie bar part T being formed between lead frames 10 of a semi-conductor device, wherein a laser ray L to be oscillated from a pulse laser oscillator 1 is divided into two in correspondent with the length of the tie bar part T, and the tie bar part is cut by irradiating both end parts of the tie bar part T with the divided laser rays.
申请公布号 JPH11320140(A) 申请公布日期 1999.11.24
申请号 JP19980151917 申请日期 1998.05.18
申请人 NEC CORP 发明人 YONEKAWA MASARU
分类号 B23K26/00;B23K26/02;B23K26/03;B23K26/06;B23K26/067;B23K26/073;H01L23/50;(IPC1-7):B23K26/00 主分类号 B23K26/00
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