ROTARY JOINT FOR FLUID

摘要

A rotary joint for fluids that provides a completely sealed path for the flow of polishing solution and which permits the supply of electricity to a polished surface detector. The rotary joint of the present invention is essentially made up of a joint block (1) and a rotator assembly (2). To the rotator assembly (2) rotatably held in the joint block (1) is attached a polishing pad shaft (104). Between the joint block (1) and the rotator assembly (2) is formed a seal space closed by a pair of seal units (5, 5), each comprising sealing rings (51, 52) which rotate in relation to each other. A fluid passage (7) continuous via a seal space (50) and running through the joint block (1) and the rotator assembly (2) is formed, and a wiring conduit running from an electric source unit (3) to the polished surface detector on the polishing pad (104) is also formed. The wiring conduit comprises a rotary connector unit (4) made up of a casing (40) and a first connector (41) supported by the rotator assembly (2) and a second connector (42) held by the joint block (1) with the two connectors (41, 42) electrically connected to each other and relatively rotatable, electric wiring (42a) running from the power unit (3) to the second connector (42), and electric wiring (41a) running from the first connector (41) to the polished surface detector (110) through a wiring conduit (24) formed in the rotator assembly (2). <IMAGE>