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发明名称
SCREENING OXIDE FOR SOURCE AND DRAIN REGIONS FORMED FROM SOLID DOPANT SOURCE
摘要
申请公布号
EP0958596(A1)
申请公布日期
1999.11.24
申请号
EP19970933371
申请日期
1997.07.10
申请人
INTEL CORPORATION
发明人
ANDIDEH, EBRAHIM
分类号
H01L21/28;H01L21/225;H01L21/8238;H01L27/092;H01L29/78;(IPC1-7):H01L21/225
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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