发明名称 FLUID COATING DEVICE AND FLUID COATING METHOD
摘要 PROBLEM TO BE SOLVED: To prevent periodic dispersions of coating start timings, generation of stripings and of defective products due to generation of slight coating unevenness. SOLUTION: This fluid coating device is constituted of a coating device main body 1, a rotating table 2 and a coating material feeder 50. The coating material feeder 50 discharges coating fluid housed in a coating liquid tank 200 to a bubble removing device 100 by a regulator 300 and supplies to a coating head 10 for applying the coating fluid by allowing the coating fluid to flow out from a slit like opening after dissolved gas in the coating fluid is removed in the bubble removing device 100.
申请公布号 JPH11319678(A) 申请公布日期 1999.11.24
申请号 JP19980140111 申请日期 1998.05.21
申请人 HIRATA CORP 发明人 FUJIWARA ITSUO
分类号 B05D1/26;B05C5/02;B05D3/00;H01L21/52 主分类号 B05D1/26
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