发明名称 APPARATUS AND METHOD FOR MANUFACTURE OF OPTICAL COMPONENT
摘要 PROBLEM TO BE SOLVED: To accurately, efficiently manufacture an optical component such as a diffraction grating or the like by providing one light source for illuminating an exposure light, and a holding mechanism having a plurality of base plates and molds arranged along a part of the same intensity distribution of the light, thereby eliminating an intensity unevenness of the light. SOLUTION: A UV curable resin 6 is placed on an upper surface of a mold 2 interiorly mounted in a mold and a base plate holding mechanism 1, and a base plate 7 is mounted on its upper surface. At this time, the mold 2 is lifted toward the plate 7 by an elastic member 4. A UV light is illuminated from a UV light source 8 to the resin 6 via the plate 7 to cure the resin 6, and a shape 5 of the mold 2 is transferred to the resin 6. Thereafter, the resin 6 is released from the mold, thereby obtaining an optical component such as, for example, a diffraction grating. According to this, since the molds 2 and the plates 7 are arranged on a plurality of concentric circles (a) to (c), an intensity of the UV light illuminated to the resin 6 can be made uniform.
申请公布号 JPH11320582(A) 申请公布日期 1999.11.24
申请号 JP19980226952 申请日期 1998.08.11
申请人 TOSHIBA CORP 发明人 ONO MOTOHARU;SAKUTA SHIGERU
分类号 G02B5/18;B29C39/10;B29K101/10;B29L11/00;G02B3/00;G02B3/02;(IPC1-7):B29C39/10 主分类号 G02B5/18
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