| 摘要 |
PROBLEM TO BE SOLVED: To construct, at low cost, a device for degassing ultrasonic washing liquid or the like, and at the same time, to miniaturize it, and to improve degassing efficiency. SOLUTION: In this device, in a cylindrical vacuum vessel, a filter 11 having fine pores of 100μm or less, preferably 1-5μm pore diameter is installed through a spiral packing 9r, and from an evacuating pipe 12 inserted into the cylinder of the filter 11, evacuation is performed, and washing liquid introduced from an introducing port 20 is filtered through the filter 11, and at the same time, gas such as dissolved oxygen is removed. And the treated washing liquid is discharged from a discharging port 21.
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