发明名称 |
Laser machining method for glass substrate, diffraction type optical device fabricated by the machining method, and method of manufacturing optical device |
摘要 |
<p>In a laser processing method for accurately forming a convexo-concave structure on the surface of a glass substrate, a periodic optical intensity distribution of a laser beam is obtained by an interference between diffracted light beams of +1 degree and -1 degree emitted from a phase mask, onto which the laser beam is irradiated, in the vicinity of the emission side of the phase mask, and a glass substrate, on which a thin film is formed, is set in the area where the periodic optical intensity distribution is provided. As a result, the thin film is evaporated or ablated depending on the periodic optical intensity, thereby a diffraction grating, which has the same period as that of the varying optical intensity, is formed on the glass substrate. <IMAGE></p> |
申请公布号 |
EP0959051(A1) |
申请公布日期 |
1999.11.24 |
申请号 |
EP19970934765 |
申请日期 |
1997.08.11 |
申请人 |
NIPPON SHEET GLASS CO., LTD. |
发明人 |
KOYAMA, TADASHI;TSUNETOMO, KEIJI |
分类号 |
B23K26/06;C03C17/23;C03C17/34;C03C23/00;(IPC1-7):C03C17/22 |
主分类号 |
B23K26/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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