| 摘要 |
PROBLEM TO BE SOLVED: To take out a work simply by a low force without the occurrence of breakage even in a state that the work is adhered to a platen by the surface tension of polishing liquid interposed between the work and the platen. SOLUTION: In a takeout device 10 provided with a chuck means 15 for chucking a work W and an attitude control mechanism 16 to change the attitude of the chuck means 15, the work W horizontally placed on the platen 3 is chucked pointing to a horizontal, by inclining the chuck means 15 by the attitude control mechanism 16, one end of the work W is lifted and peeled from the platen 3. Thereafter, the whole of the work W is lifted and taken out from the platen 3. |
