| 发明名称 |
Method and apparatus for recovering process liquid and eliminating trapped air |
| 摘要 |
The present invention discloses a closed-loop method for recovering a process liquid and eliminating trapped air contained in the process liquid by utilizing a manual pump having generally a bellow construction for transporting the process liquid that contains trapped air back into a liquid reservoir for venting the trapped air.
|
| 申请公布号 |
US5989317(A) |
申请公布日期 |
1999.11.23 |
| 申请号 |
US19970856125 |
申请日期 |
1997.05.14 |
| 申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
HUANG, CHENG H.;WANG, RAY C.;LIU, TEH Y.;CHAO, CHENG H. |
| 分类号 |
B01D19/00;(IPC1-7):B01D19/00 |
主分类号 |
B01D19/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
