发明名称 Two-axis magnetically coupled robot
摘要 A robot having a pair of magnetic couplings that each couple a motor in a cylindrical first chamber to an associated cylindrical ring closely spaced from the cylindrical wall of said first chamber. The robot includes a mechanism to convert rotation of each of these rings into separate motions of the robot. In the preferred embodiment, these separate motions are radial and rotational.
申请公布号 US5990585(A) 申请公布日期 1999.11.23
申请号 US19980049035 申请日期 1998.03.27
申请人 APPLIED MATERIALS, INC. 发明人 LOWRANCE, ROBERT B.
分类号 B25J9/06;B25J9/10;B25J9/12;B25J19/00;B25J21/00;F16D7/02;F16H49/00;H01L21/00;H01L21/673;H01L21/677;(IPC1-7):G21K5/10;B25J9/14 主分类号 B25J9/06
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