| 摘要 |
PCT No. PCT/JP97/00309 Sec. 371 Date Oct. 7, 1997 Sec. 102(e) Date Oct. 7, 1997 PCT Filed Feb. 7, 1997 PCT Pub. No. WO97/29224 PCT Pub. Date Aug. 14, 1997A single crystal producing apparatus to be used for raising the single crystals by a CZ method. A cylindrical portion of a main chamber of the single crystal producing apparatus can be separated from the apparatus. Hot zone components can be retained within the cylindrical portion. After the pulling up operation, the cylindrical portion is separated from the apparatus with the hot zone components being engaged with within the cylindrical portion and is carried to another chamber. In another chamber, an overhauling, reproducing and assembling operations of the hot components can be conducted. In the single crystal producing apparatus, a cylindrical portion which goes through an assembling operation of the hot zone components in another chamber is engaged with the apparatus, and the next pulling up operation is conducted. Time required to the next pulling up operation is shortened. The dust amount within the pulling up chamber is reduced.
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