| 摘要 |
A field emitter array comprises a plurality of cathode electrodes and an anode electrode disposed opposite to the plurality of cathode electrodes. And the anode electrode is provided with a plurality of protrusions having a cap material disposed on the tip of each protrusion. A voltage below a designated value is applied between a gate electrode and the cathode electrodes, and electrons are released only from a cathode electrode with a low emission start voltage. When the electrons are emitted to the cap material provided on the protrusions, the cap material is sputtering-evaporated and is affixed to the cathode electrode. Then a cap is disposed on the each of the cathode electrodes. Then, the emission properties between each cathode electrode are consequently rendered uniform, thereby increasing the emission start voltage and maximum applied voltage of the overall field emitter array.
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