发明名称 |
Reliable. modular, production quality narrow-band KRF excimer laser |
摘要 |
A reliable, modular, production quality narrow-band KrF excimer laser capable of producing 10 mJ laser pulses at 1000 Hz with a bandwidth of about 0.6 pm or less. The present invention is especially suited to long-term round-the-clock operation in the lithographic production of integrated circuits. Improvements over prior art lasers include a single upstream preionizer tube and acoustic baffles. A preferred embodiment includes reduced fluorine concentration, an anode support bar shaped to reduce aerodynamic reaction forces on blower bearings, a modified pulse power system providing faster pulse rise time, an output coupler with substantially increased reflectivity, a line narrowing module with CaF prism beam expanders, a more accurate wavemeter, a laser computer controller programmed with new and improved pulse energy control algorithm.
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申请公布号 |
US5991324(A) |
申请公布日期 |
1999.11.23 |
申请号 |
US19980041474 |
申请日期 |
1998.03.11 |
申请人 |
CYMER, INC. |
发明人 |
KNOWLES, DAVID S.;AZZOLA, JAMES H.;BESAUCELE, HERVE A.;DAS, PALASH P.;ERSHOV, ALEXANDER I.;FOMENKOV, IGOR V.;JUHASZ, TIBOR;OZARSKI, ROBERT G.;PARTLO, WILLIAM N.;ROTHWEIL, DANIEL A.;SANDSTROM, RICHARD L.;UJAZDOWSKI, RICHARD C.;WATSON, TOM A.;NESS, RICHARD M. |
分类号 |
H01S3/038;G03F7/20;H01S3/02;H01S3/03;H01S3/036;H01S3/0971;H01S3/1055;H01S3/139;H01S3/225;(IPC1-7):H01S3/22 |
主分类号 |
H01S3/038 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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