发明名称 MULTILAYERED CVD COATED ARTICLE AND PROCESS FOR PRODUCING SAME
摘要 The invention relates to a cemented carbide or ceramic article having a multilayered coating of a plurality of ultrathin CVD coating layers, and a process for producing same. Each of the ultrathin CVD coating layers has a thickness of approximately 200 nanometers or less. The multilayered coating ranges from approximately 50-400 layers, has excellent adherence and a smoothness and a hardness of at least approximately 40 GPa. The CVD coated article of the present invention exhibits improved coating properties of excellent smoothness, uniformity, toughness, hardness and abrasive wear resistance.
申请公布号 WO9958738(A1) 申请公布日期 1999.11.18
申请号 WO1998US23943 申请日期 1998.11.10
申请人 VALENITE INC. 发明人 NARASIMHAN, KRISHNAN;RUSSELL, WILLIAM, C.
分类号 C23C16/02;C23C16/30;C23C16/44;C23C16/455;C23C30/00;(IPC1-7):C23C16/44;C23C28/04 主分类号 C23C16/02
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