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发明名称
Positiv arbeitende Photolack-Zusammensetzung
摘要
申请公布号
DE69033212(T2)
申请公布日期
1999.11.18
申请号
DE19906033212T
申请日期
1990.04.26
申请人
FUJI PHOTO FILM CO., LTD.
发明人
UENISHI, KAZUYA;SAKAGUCHI, SHINJI;KOKUBO, TADAYOSHI
分类号
G03F7/022;H01L21/027;H01L21/30;(IPC1-7):G03F7/022
主分类号
G03F7/022
代理机构
代理人
主权项
地址
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