| 发明名称 |
A CARRIER HEAD WITH A RETAINING RING FOR A CHEMICAL MECHANICAL POLISHING SYSTEM |
| 摘要 |
<p>A carrier head (140) for chemical mechanical polishing with a retaining ring (108) having an inclined inner surface (150). The force of the edge of the substrate against the inclined surface (150) causes a reactive force having a vertical component on the edge of the substrate (10). This vertical force can reduce the edge effect.</p> |
| 申请公布号 |
WO9958297(A1) |
申请公布日期 |
1999.11.18 |
| 申请号 |
WO1999US09381 |
申请日期 |
1999.04.29 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
PERLOV, ILYA;GANTVARG, EUGENE |
| 分类号 |
B24B37/32;H01L21/304;(IPC1-7):B24B41/06;B24B37/04 |
主分类号 |
B24B37/32 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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