| 摘要 |
<p>PURPOSE:To obtain thin film resistor with the capability of wide range of resistivity prescription and stability to head and change on standing in moist condition by heating the substrate and evaporating or spattering molybdenum boride. CONSTITUTION:Forming MoB thin film on the substrate such as glass or glazed ceramic by electron beam evaporating or spattering. In the case of the electron beam evaporation procedure MoB tablets are prepared by pressing MoB powder, and MoB is evaporated under heating the substrate at 200 to 500 deg.C. In the case of the spattering procedure MoB is spattered on a substrate with high frequency dipolar spatter under heating the substrate at 200 to 500 deg.C, using hot pressed (e.g. at 1300 deg.C) MoB as a target. Thereby, a small-sized thin film resistor with reduced resistance temperature coefficient and cxcellent stability to changes in temperature and other conditions of atmosphere can be obtained.</p> |
