SEMICONDUCTOR DEVICE HAVING SPIRAL WIRING DIRECTLY COVERED WITH INSULATING LAYER CONTAINING FERROMAGNETIC PARTICLES AND PROCESS OF FABRICATION THEREOF

摘要

A spiral conductive layer formed over a semiconductor substrate is covered with a ferromagnetic particle containing photo-sensitive polyimide layer, and the ferromagnetic particle containing photo-sensitive polyimide layer is patterned into a ferromagnetic insulating layer inserted between turning portions of the spiral conductive layer through a lithographic process, thereby making the structure of a spiral inductor simple.