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发明名称
摘要
申请公布号
JP2977321(B2)
申请公布日期
1999.11.15
申请号
JP19910114928
申请日期
1991.05.20
申请人
TOSHIBA KK;TOSHIBA MAIKURO EREKUTORONIKUSU KK
发明人
YAMADA SHIGERU;TAKAHASHI TSUTOMU;ABE ISAO
分类号
H01L21/822;G09G3/36;H01L27/04;H03K17/693;(IPC1-7):H01L27/04
主分类号
H01L21/822
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