REFRIGERATING PLATE FOR SEMICONDUCTOR MATERIAL MANUFACTURING APPARATUS,申请号KR19960060041U-传众专利搜索

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发明名称	REFRIGERATING PLATE FOR SEMICONDUCTOR MATERIAL MANUFACTURING APPARATUS
摘要
申请公布号	KR200161480(Y1)	申请公布日期	1999.11.15
申请号	KR19960060041U	申请日期	1996.12.28
申请人	HYUNDAI ELECTRONICS IND. CO.,LTD	发明人	KIM, YONG PYO;LEE, KI HO
分类号	H01L21/306	主分类号	H01L21/306
代理机构		代理人
主权项
地址

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