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发明名称
摘要
申请公布号	JP2977959(B2)	申请公布日期	1999.11.15
申请号	JP19910197443	申请日期	1991.07.12
申请人	SHICHIZUN TOKEI KK	发明人	YANADA SHUJI
分类号	G01R31/26;H01L21/321;H01L21/60;H01L21/66;(IPC1-7):H01L21/66	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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