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发明名称
PROBING APPARATUS
摘要
申请公布号
KR100230696(B1)
申请公布日期
1999.11.15
申请号
KR19920016615
申请日期
1992.09.09
申请人
TOKYO ELECTRON YAMANASHI LIMITED
发明人
YAMASITA, SATORU
分类号
H01L21/66;(IPC1-7):H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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