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发明名称
PROCESS AND SYSTEM FOR OPERATING MAGNETRON DISCHARGES
摘要
申请公布号
EP0954876(A1)
申请公布日期
1999.11.10
申请号
EP19980907975
申请日期
1998.01.22
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人
GOEDICKE, KLAUS;WINKLER, TORSTEN;JUNGHAEHNEL, MICHAEL;FIETZKE, FRED;KIRCHHOFF, VOLKER;RESCHKE, JONATHAN
分类号
H01J37/34;(IPC1-7):H01J37/34
主分类号
H01J37/34
代理机构
代理人
主权项
地址
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