Process and apparatus for growing single crystals

摘要

In a process for semiconductor single crystal prodn. by the Czochralski method employing a magnetic field which acts on the melt in a rotatable quartz glass crucible during crystal growth, the magnetic field is generated by superimposing static and alternating magnetic fields. Also claimed is an appts. for carrying out the above process, the appts. having a vessel which is equipped with resistance heater surrounding a melt-filled crucible, a single crystal pulling device and a magnetic device for generating a magnetic field in the melt. The novelty is that the magnetic device comprises two coils surrounding the crucible, one coil generating a static magnetic field and the other coil generating an alternating magnetic field, and is pref. surrounded by a ring of magnetic material.