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发明名称
Method for coating a resist film and rsist coater
摘要
申请公布号
GB9920903(D0)
申请公布日期
1999.11.10
申请号
GB19990020903
申请日期
1999.09.03
申请人
NEC CORPORATION
发明人
分类号
B05D1/40;B05C11/08;B05D1/00;G03F7/16;H01L21/027
主分类号
B05D1/40
代理机构
代理人
主权项
地址
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