POLISHING APPARATUS

摘要

A compact polishing apparatus (30) can produce a high degree of flatness and cleanliness in the polished object. The polishing apparatus (30) comprises a polishing table having an abrading plate (59), a pressing device (32) for forcing a work surface of a workpiece (1) against an abrading surface (59) of the abrading plate. A driving device is provided for making the abrading surface (59) and the work surface undergo a relative circulative translation motion tracing a given pattern.