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经营范围
发明名称
Polishing apparatus.
摘要
申请公布号
GB2337014(A)
申请公布日期
1999.11.10
申请号
GB19990010105
申请日期
1999.04.30
申请人
* SPEEDFAM CORPORATION
发明人
ROBERT L * ANDERSON III;MICHAEL * MANSEAU;JANUSZ ALEKSANDER * DERZA;JOHN EDWARD * BUSSAN
分类号
B24B7/17;B24B7/22;(IPC1-7):B24B7/17
主分类号
B24B7/17
代理机构
代理人
主权项
地址
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