| 摘要 |
PROBLEM TO BE SOLVED: To obtain a carbon material excellent in plasma resistance by specifying the material so that average lattice spacing of graphite hexagonal net face layer and size of crystallite have crystalline properties in specific values or below and ratios of the nitrogen content and N-H bond are each specific ratio or below. SOLUTION: In this carbon material, average lattice spacing d002 of graphite hexagonal net face layer is <=0.365 nm and the size of crystallite Lc (002) is >=1.5 nm and nitrogen content is <=100 ppm and a ratio of N-H bond bonding to hydrogen atom among nitrogen atoms which exist in the structure is <=30%. Further, it is preferably that the carbon material has material properties of >=1.50 g bulk density and >=1,300 kgf/cm<2> flexural strength. Furthermore, the carbon material preferably has high purity of <=5 ppm ash content and about <=2 ppm metal impurity. Glassy carbon material having such properties can be obtained by properly controlling conditions of each step of production process. |
