LASER BEAM MACHINE, AND LASER BEAM MACHINING METHOD

摘要

PROBLEM TO BE SOLVED: To ensure the form of a machined wall surface and the machining quality by providing transfer lens between a mask and a work, and >=2 collimators between a laser beam oscillator and the mask, and moving one collimator on the laser beam. SOLUTION: The work 6 is machined by the laser beam by outputting the laser beam from a laser beam oscillator 1. A mask 4 is arranged between the work 6 and the laser beam oscillator 1, and a transfer lens 5 is arranged between the mask 4 and the work 6. A collimator comprising a fixed lens 2 and a movable lens 3 is equipped between the laser beam oscillator 1 and the mask 4. The movable lens 3 to constitute the collimator is moved on the direction of the optical axis by a driver 8. One lens of the collimator is fixed on the optical axis, and the remaining lens is moved on the laser beam. A control means to control a moving means of the collimator is provided, and the position of the movable lens 3 to save the labor.