| 摘要 |
PROBLEM TO BE SOLVED: To stably detect the deviation value of an IC chip at the moving of a camera loaded on an XY table, and detecting the deviation value from a reference point to a constant point on the IC chip. SOLUTION: At the moving of a camera 1 loaded on an XY table 4, and a deviation value from a reference point to a constant point on an IC chip 6, the deviation value detected in the past is stored in a memory, and the mean value of the deviation values is calculated, and the mean value is added to the reference point, and the camera is moved to the added position so that the constant point on the IC chip 6 can be positioned within a detection range. |
